Expertise Facility Types

Research tagged "active vibration control"

Active Vibration Control in Fabs

As device geometries go down, the need to isolate sensitive process tools from vibration increases. Building construction techniques and passive control methods can keep most of the vibrations under control, but low-frequency vibrations are still a problem. Adding active vibration control to the tool itself can cancel those problems. Kim, J. J., and H. Amick, […]...
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