An investigation of dynamic soil-structure interaction as it relates to the design of foundation systems for microelectronics fabrication facilities
In recent years, vibration has become increasingly important as a factor to consider in the design of microelectronics fabrication facilities. As the demand for higher precision tools increases, the importance of vibration control also increases. In fact, at the present time, many aspects of structure/foundation design are controlled by vibration considerations rather than the traditional […]...