The purpose of this paper is to set in perspective some of the issues involved in the dynamic of advanced technology facilities. By dynamics we mean vibration performance and vibration response. Through much of the paper, attention is focused on the microelectronics industry since vibration here is of critical importance and since this industry, more […]...

Early on in our work with the microelectronics industry, there were no vibration criteria that one could use as a basis for facility design – nor were there even accepted methods for measuring vibration performance. Few, if any, tool makers had developed accurate performance requirements for their tools. Even at the present time, significant numbers […]...