Early on in our work with the microelectronics industry, there were no vibration criteria that one could use as a basis for facility design – nor were there even accepted methods for measuring vibration performance. Few, if any, tool makers had developed accurate performance requirements for their tools. Even at the present time, significant numbers of tools lack reliable vibration and acoustic specifications. In this paper, we examine the evolution of vibration considerations in fab design. We discuss the present status, and elaborate on future needs, with specific reference to 300 mm conversion.
Ahmad Bayat and Colin G. Gordon, "A Discussion of Vibration Issues in Microelectronics Fabrication – Past, Present and Future," Proceedings of the ICCCS 14th International Symposium on Contamination Control, Institute of Environmental Sciences and Technology (IEST), pp. 139-143, April 1998.844728195ba81a0f807256925c019503