The presentation examines how different structural designs and isolation schemes impact vibration characteristics of space in advanced technology facilities. Vibration data measured in completed facilities successfully working at the nanometer scale are used to explore the manner in which vibration criteria of “better than VC-E or NIST-A” can be achieved. Data from 23 different schemes are introduced and their key design parameters are discussed.
H. Amick, “Vibrations: Measured performance of newly designed and built nanoscale research facilities,” ESTECH 2010 Nanotechnology Seminar, Reno NV, 5 May 2010
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