Cardiff Innovation System Campus (CISC)
Cardiff University, Wales
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Projects tagged "cleanroom noise"
Research tagged "cleanroom noise"
Noise in Cleanrooms Served by Fan-Filter Units: Design Considerations
This paper is concerned with noise conditions in cleanrooms served by fan-filter units (FFUs), primarily of higher order clean class (ISO Class 1 through 5), although the concepts discussed also apply to rooms with higher particle counts (ISO Class 6 and higher). The need for frequent air changes to achieve the cleanliness goal is often […]...
Noise of Cleanroom Recirculation Air Systems
The commonly used recirculation air systems for microelectronics cleanrooms are described in this paper. The sound attenuation along the air flow paths are discussed along with noise control concerns. Also presented are the typical sound pressure levels measured in operating cleanrooms. Mei Q. Wu and Colin G. Gordon, "Noise of Cleanroom Recirculation Air Systems," (with […]...
Vibration and Noise Control in Microelectronics Cleanrooms – A Tutorial
Colin G. Gordon, “Vibration and Noise Control in Microelectronics Cleanrooms – A Tutorial," Proceedings of Cleanrooms '97 West, Santa Clara, CA, October 1997....
A Review of Noise Issues in Semiconductor Clean Rooms
The production of microelectronic semiconductor products requires a facility that is environmentally controlled and virtually free from contaminants. Airborne contaminants are controlled through the use of laminar-flow clean rooms whose air-handling systems provide highly-filtered air at rates of up to 100 air changes per hour, depending upon the class. The air-handling systems in general and […]...
Noise Prediction and Control in Microelectronics Clean Rooms
Modern clean rooms of the sort used by the microelectronics industry in the fabrication of integrated circuits are typically quite noisy with levels lying in the range PNC 55 to 75. The noise can degrade the performance of production and test equipment. It also interferes with speech and telephone use and adds generally to the […]...
Vibration and Noise Control in State-of-the-Art Clean Rooms
Vibration and noise may be ranked along-side other sources of microcontamination insofar as their effect on the IC fabrication process is concerned. In this paper we will discuss the design goals that are currently used. We will review the techniques that are available to quantify and control vibration and noise. Gordon, C. G. and H. […]...