Vibration and noise may be ranked along-side other sources of microcontamination insofar as their effect on the IC fabrication process is concerned. In this paper we will discuss the design goals that are currently used. We will review the techniques that are available to quantify and control vibration and noise.
Gordon, C. G. and H. Amick, "Vibration and Noise Control in State-of-the-Art Clean Rooms," Proceedings of Microcontamination 89, Anaheim, California (Oct. 1989).