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Research tagged "vibration design"

Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case Studies

The authors present a review of current healthcare facility vibration criteria: Process of selecting criteria Process of selecting design parameters Case Study: Surgical microscope and its criteria Summary of criteria we use   M. Gendreau and H. Amick, “Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case […]...
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Use of vibration criteria in the selection of building systems for nanoscale research facilities

Stringent vibration requirements must be met for laboratories housing sensitive equipment for nanotechnology research.  This paper provides guidance to the designer in the selection of structural systems to limit vibrations to acceptable levels.  Comments are also made on site selection, building planning issues, and cost-effectiveness solutions.  The concepts proposed are illustrated with examples of the […]...
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An experimental study of vibration attenuation performance of several on-grade slab configurations

There are several instances in the literature in which particular positions are taken regarding the nature of the floor supporting sensitive equipment such as advanced electron microscopes. Assertions are made that one methodology is better than another at reducing vibrations. However, very little experimental evidence has been provided to support those positions. This paper presents […]...
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Addressing the environmental challenges of the NIST Advanced Measurement Laboratory

The recently built Advanced Measurement Laboratory at the National Institute of Standards and Technology (NIST) provides a great step forward for that organization with regard to its research environments. Vibration and temperature control were among the most critical concerns expressed by the researchers, and considerable attention was given to meeting their objectives. Critical laboratory environments […]...
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Micro-Vibration and Noise

Noise and vibration are contaminants in semiconductor processing and research. Since the tools used in semiconductor manufacturing are sensitive to vibration and noise to varying degrees, excessive amounts of these contaminants can adversely impact yield, throughput, or the operating line width or resolution of the tools. In addition to the potential impact to tools, noise […]...
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Tool or Facility – What Should it Be? Reconciling Differences between Production Equipment Needs and Facility Support

It is not unusual for production equipment’s environmental requirements to be more stringent than the facility can economically provide, thus forming a “gap” between tool needs and facility capabilities, as shown in Fig. 1.  The gap can involve requirements for vibration, sound, EMI, cleanliness, or any of the many other environmental parameters.  This paper presents […]...
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Actual Vibration and Acoustics Measures on a Completed Nanotech Building — Duffield Hall

A case study, including vibration performance data, of one of the first buildings designed for nanoscale research. H. Amick, M. Gendreau and T. Xu, “Actual Vibration and Acoustics Measures on a Completed Nanotech Building — Duffield Hall,” invited presentation for the 2004 International Conference “Nanotechnology Research Space – The Next Step,” August 15-16, 2004, Ithaca, […]...
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Vibration Design of 300 mm Wafer Fabs

The semiconductor industry is experiencing the transition from 200mm to 300mm fabs. With a number of 300mm fabs now on-line, and many more in the construction and start-up stages, a discussion of 300mm fab design is pertinent. Vibration is an important concern in fab design and construction because many items of precision equipment (or “tools”) […]...
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Facility Vibration Issues for Nanotechnology Research

The paper presents an overview of the vibration requirements of nanotechnology facilities, drawn from both the semiconductor world and that of precision metrology. Structural approaches are discussed which are commonly used to meet some of the special vibration needs of these facilities. H. Amick, M. Gendreau, and C. G. Gordon, “Facility Vibration Issues for Nanotechnology […]...
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Designing for Vibrations in the Laboratory

Many processes involved in advanced technology applications are highly sensitive to vibrations. Among these processes are precision metrology, high-energy physics, long-beam-path laser applications, biotechnology research, and the R&D and production of semiconductors. When designing facilities housing this equipment, considerable attention is spent on the mechanical and structural aspects. In most cases, vibration control measures add […]...
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Vibration Control Design of High Technology Facilities

High technology equipment such as that used for the production of advanced integrated circuits, for precision metrology, and for microbiological or optical research, requires environments with extremely limited vibrations. Ground motions, personnel activities, and the extensive support machinery typically present in high technology facilities may produce unacceptably severe vibrations, unless mitigation of these vibrations is […]...
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Vibration Control in Microelectronics Cleanrooms

In this tutorial we shall try to unravel some of the mysteries of cleanroom vibration: sources; methods of propagation; measurements; criteria and specifications; control and isolation.  The plan is to provide attendees with some of the tools necessary to understand the issues involved in vibration control.  Colin Gordon, “Vibration Control in Microelectronics Cleanrooms,” tutorial given […]...
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Optimizing the Placement of a Road between Two Research Buildings – a Case Study

A problem arose during the design of major site renovations of a research campus that serves several research organizations. Prior to the site planning, two tenant organizations had progressed far into the design of new laboratory facilities. Each facility had a demonstrable sensitivity to vibration; unfortunately, there had been little coordination of the vibration requirements […]...
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Vibration Prediction and Control in Microelectronics Facilities

The importance of vibration in microelectronics production can be appreciated when one considers the extreme sensitivity of the "tools" and systems used in the chip fabrication process and the large amount of mechanical energy that is consumed in a modern cleanroom.  The great difference in the ratio of "power consumed" to "sensitivity" lies at the […]...
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Design of Stiff, Low-Vibration Floor Structures

Dynamic loading of a floor can excite vibrations that may adversely affect production or research activities using equipment supported on that floor. These loads may be caused by mechanical systems or personnel activities. One way to minimize vibrations is with a slab-on-grade floor, but often this is not possible due to constraints such as lot […]...
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Structural Systems

D. Pekrul and T Ruys, “Structural Systems,” (includes vibration and vibration control), Chapter 5.2 in Handbook of Facilities Planning: Volume 1—Laboratory Facilities, Theodorus Ruys, editor, Van Nostrand Reinhold, 1990....
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Vibration and Noise Control in State-of-the-Art Clean Rooms

Vibration and noise may be ranked along-side other sources of microcontamination insofar as their effect on the IC fabrication process is concerned. In this paper we will discuss the design goals that are currently used. We will review the techniques that are available to quantify and control vibration and noise. Gordon, C. G. and H. […]...
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Vibrating Buildings

Please click on the Document Title above to see detail. Amick, H., "Vibrating Buildings," Development Magazine, pp. 43-45 (May/June 1988)....
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The Design of Low-Vibration Buildings Two Case Histories

Two case histories are presented that illustrate two aspects of the design problems.  The first is entitled “The Role of Special Foundations in the Design of Low Vibration Buildings.”  The Second is entitled “The Role of Sprung Floors in the Design of Low Vibration Environments.” Colin G. Gordon, “The Design of Low-Vibration Buildings Two Case […]...
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The Design of Low-Vibration Buildings for Microelectronics and Other Occupancies

In this paper I present an overview of the factors and problems that must be considered in designing low-vibration buildings. Subjects covered include vibration criteria for different occupancies, sources of vibration and response predictions, and major design factors for vibration control. Colin G. Gordon, “The Design of Low-Vibration Buildings for Microelectronics and Other Occupancies,” First […]...
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Cost-Effective Design of Practically Vibration-Free High-Technology Facilities

Advanced electro-optical equipment, such as that used in the production of integrated circuits, requires clean environments with extremely limited vibrations.  Ground motions, personnel activities, and mechanical equipment tend to produce unacceptably severe vibrations in high-technology facilities, unless suitable precautions are taken. Ungar, E. E., and Gordon, C. G., “Cost-Effective Design of Practically Vibration-Free High-Technology Facilities,” […]...
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News tagged "vibration design"