Noise and vibration are contaminants in semiconductor processing and research. Since the tools used in semiconductor manufacturing are sensitive to vibration and noise to varying degrees, excessive amounts of these contaminants can adversely impact yield, throughput, or the operating line width or resolution of the tools. In addition to the potential impact to tools, noise impacts personnel working in the clean rooms and labs, and it is usually regulated in the external environment. The vibration and noise performance of semiconductor and other advanced technology research and manufacturing buildings must be considered early in the conceptual design stage and throughout the design and construction of the project. This chapter discusses these and other considerations necessary to provide acceptable noise and vibration environments for semiconductor manufacturing and other advanced technology work (nanotechnology research, LCD-TFT manufacturing, sensitive biotechnology work, and so on).
M. Gendreau and H. Amick, “Micro-Vibration and Noise,” Chapter 29 in Semiconductor Manufacturing Handbook, Hwaiyu Geng, editor, McGraw-Hill, 2005.