Vibration Considerations for Sensitive Research and Production Facilities
E. E. Ungar, H. Amick, and J. A. Zapfe, “Vibration Considerations for Sensitive Research and Production Facilities,” Chapter 13 in Structural Dynamics of Electronic and Photonic Systems, Ephraim Suhir, Dave Steinberg and T. X. Yu, editors, Wiley, 2011....
Vibration sensitivity of optical microscopes in the healthcare setting
The paper examines vibration criteria for benchtop and articulated floor-supported optical microscopes, comparing published specifications with data measured in hospitals for diagnostic purposes. A case study of vibrations that degraded orthopedic microsurgery is of particular interest. Revisions and enhancements of published criteria are proposed. H. Amick and M. Gendreau, “Vibration sensitivity of optical microscopes in […]...
Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case Studies
The authors present a review of current healthcare facility vibration criteria: Process of selecting criteria Process of selecting design parameters Case Study: Surgical microscope and its criteria Summary of criteria we use M. Gendreau and H. Amick, “Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case […]...
Generic Noise Criterion Curves for Sensitive Equipment
ABSTRACT Electron beam-based instruments, and other high-resolution instruments, are sensitive to the environment in which they operate. Adverse environments may limit achievable resolution. Equipment manufacturers provide specifications defining acceptable amplitudes of various environmental contaminants, such as vibration, electro-magnetic energies, and acoustic noise. However, the quality of these specifications varies significantly, from well-defined to conjectural. Additionally, […]...
Visually Observable Vibration Sensitivity of a Laboratory Bench Microscope
[1] ABSTRACT Bench-mounted optical microscopes have a wide variety of applications in science and technology. The vibration sensitivity is a function of magnification, vibration direction and support conditions. The paper presents the results of experimental studies addressing vibration sensitivity as well as the amplification and attenuation provided by typical laboratory casework. The benchtop vibration amplitudes […]...
Evolving criteria for research facilities: vibration
ABSTRACT The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the “BBN” criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared […]...
Considerations regarding the appropriate timing for advanced technology facility vibration surveys
Vibration surveys are carried out for a variety of reasons over the lifetime of a facility for semiconductor fabrication (fab) or other advanced technology process.[1] Evaluations may take place as part of the site selection effort, during construction, or during the productive life of the facility. Generally, there should be a reason for a vibration […]...
Generic Vibration Criteria for Vibration-Sensitive Equipment
The vibration criterion (VC) curves, commonly used in the design of facilities which house vibration-sensitive instruments and tools, were developed by the author and his colleagues, in the early 80’s, published by SPIE in 1991 and by IEST in 1993. Each of the criterion curves A through E is associated with a “line width” or […]...
On Generic Vibration Criteria for Advanced Technology Facilities: with a Tutorial on Vibration Data Representation
Abstract The design of vibration-sensitive advanced technology facilities generally involves considerable attention to structural and mechanical aspects. In most cases, the vibration control measures contribute significantly to a facility’s cost. The selection of a vibration criterion for use in design is an important step in the design process. Many process equipment manufacturers have provided tool-specific […]...
Generic Criteria for Vibration-Sensitive Equipment,” Vibration Control in Microelectronics, Optics and Metrology
The vibration criterion (VC) curves, commonly used in the design of facilities which house vibration-sensitive instruments and tools, were developed by the author and his colleagues, in the early 80’s, published by SPIE in 1991 and by IEST in 1993. Each of the criterion curves A through E is associated with a “line width” or […]...