Expertise Facility Types

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Our consultants regularly engage in research activities related to our normal client services. This archive includes the majority of the published technical papers, presentations, and other publications related to this research.

Case Study – Vibration Source Investigation in Large Semiconductor Fab Facility

    ABSTRACT Semiconductor fabrication facilities contain many vibration sensitive instruments which are often in close proximity to large vibration sources. A good structural system and proper vibration isolation of mechanical equipment is required to minimize the impact from sources such as pumps, fans, piping, and ducts within the building. This paper presents a case […]...
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Temperature and Frequency Effects on Properties of Polymer-Modified Concrete

The dynamic elastic modulus and damping of concrete made from ordinary portland cement (OPC) remain relatively constant over the significant ranges of temperatures and frequencies that might be encountered in normal application.  However, this is not the case with polymer-modified concrete (PMC).  This paper presents results of an experimental study examining the role of temperature […]...
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Dynamic Stiffness and Subgrade Modulus of a Slab-on-Ground

“Conventional wisdom” amongst users of cutting-edge electron microscopes and other sensitive research instruments is that their instrument will perform better if supported on a “thick” concrete slab-on-ground.  Typically, their choice of a slab thickness is based on what worked well for someone else, without any thought given to an analytical justification.  The paper presents the […]...
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Voids Beneath Slabs-on-Ground: Using the impulse response test to verify adequate slab support

Introduction A concrete slab-on-ground is one of the most common of all floor types.  Slabs-on-ground are popular for many applications, especially in research facilities, where they usually provide the highest-quality vibration environment.  This is because they are stiff and uniformly supported, such that they do not exhibit the resonance characteristics of a suspended slab. As […]...
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Long-span truss structures for low-vibration environments

Historically, waffle slabs have been widely used in the process floor design in semiconductor production facilities.  In a less stringent vibration environment, concrete joist slab with stiffeners could be a suitable design option. In both of the two approaches, the effectiveness of vibration control in floor structures would be substantially reduced when the column span […]...
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Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case Studies

The authors present a review of current healthcare facility vibration criteria: Process of selecting criteria Process of selecting design parameters Case Study: Surgical microscope and its criteria Summary of criteria we use   M. Gendreau and H. Amick, “Mechanical and Footfall Vibration Impact to Healthcare Facilities: Criteria and Design Strategies based on Research and Case […]...
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Maturation’ of the Vibration Environment in Advanced Technology Facilities

Abstract Semiconductor production and other advanced technology facilities are often designed in two stages, delineated as “base build” and “hook up”. The first stage, at completion termed “as-built” by ISO, includes the design and construction of the shell structure and all architectural, mechanical, electrical, and process systems needed to operate the building. The second stage, […]...
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On Generic Vibration Criteria for Advanced Technology Facilities: with a Tutorial on Vibration Data Representation

Abstract The design of vibration-sensitive advanced technology facilities generally involves considerable attention to structural and mechanical aspects. In most cases, the vibration control measures contribute significantly to a facility’s cost. The selection of a vibration criterion for use in design is an important step in the design process. Many process equipment manufacturers have provided tool-specific […]...
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