The paper presents an overview of the vibration requirements of nanotechnology facilities, drawn from both the semiconductor world and that of precision metrology. Structural approaches are discussed which are commonly used to meet some of the special vibration needs of these facilities.
H. Amick, M. Gendreau, and C. G. Gordon, “Facility Vibration Issues for Nanotechnology Research,” Proceedings of the Symposium on Nano Device Technology 2002, National Chiao-Tung University, Hsinchu, Taiwan (2 to 3 May 2002), pp. 107-110
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