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Research tagged "nist-a1 slab"

Facility Vibration Issues for Nanotechnology Research

The paper presents an overview of the vibration requirements of nanotechnology facilities, drawn from both the semiconductor world and that of precision metrology. Structural approaches are discussed which are commonly used to meet some of the special vibration needs of these facilities. H. Amick, M. Gendreau, and C. G. Gordon, “Facility Vibration Issues for Nanotechnology […]...
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Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab

This paper reports the results of the finite element analysis and in-situ testing of a large-scale (4m x 10m) pneumatically isolated concrete slab. The slab was constructed as a design prototype for next-generation metrology laboratories at the National Institute of Standards and Technology (NIST) in Gaithersburg, MD. Data include computed and measured modeshapes and natural […]...
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NIST – Advanced Technology Laboratories: Metrology Laboratories & Vibration Control

The focus of this paper will be on laboratory design and issues related to vibration mitigation based upon the recent experience of Henningson, Durham & Richardson, Inc. (HDR) and its consultant, Acentech Incorporated, in designing new Advanced Technology Laboratories (ATLs) for the National Institute of Standards & Technology (NIST). Issues related to site selection, laboratory […]...
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