The paper discusses an improved method for the vibration isolation of large areas in vibration-sensitive facilities, such as those used for nanotechnology R&D. Although the use of a large inertial mass supported on airsprings is not new, there are size-related drawbacks associated with this approach, most notably those associated with resonance amplification within the inertial mass itself. This resonance amplification is governed largely by the material damping properties of the concrete. The paper presents the results of a study intended to address means by which the concrete damping may be increased, thus reducing the amplification caused by the inertial mass. Methods are shown by which modal damping may be introduced into the concrete masses.
H. Amick and P. J. M. Monteiro, “Vibration Control Using Large Pneumatic Isolation Systems with Concrete Damping Inertia Masses,” Proc. 7th Intl. Conf. on Motion and Vibration Control, (MoViC 04), Paper 118, August 8-11, 2004, Washington University, St. Louis, MO.16ee2bd4f2123659e0f82b9e5ec88b3e