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Research tagged "vibration criteria"

Vibration sensitivity of optical microscopes in the healthcare setting

The paper examines vibration criteria for benchtop and articulated floor-supported optical microscopes, comparing published specifications with data measured in hospitals for diagnostic purposes.  A case study of vibrations that degraded orthopedic microsurgery is of particular interest.  Revisions and enhancements of published criteria are proposed. H. Amick and M. Gendreau, “Vibration sensitivity of optical microscopes in […]...
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Visually Observable Vibration Sensitivity of a Laboratory Bench Microscope

[1] ABSTRACT Bench-mounted optical microscopes have a wide variety of applications in science and technology. The vibration sensitivity is a function of magnification, vibration direction and support conditions. The paper presents the results of experimental studies addressing vibration sensitivity as well as the amplification and attenuation provided by typical laboratory casework. The benchtop vibration amplitudes […]...
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Vibration Sensitivity of a Laboratory Bench Microscope

Bench-mounted optical microscopes have a wide variety of applications in science and technology.  The vibration sensitivity is a function of magnification, vibration direction and support conditions.  The paper presents the results of experimental studies addressing vibration sensitivity as well as the amplification and attenuation provided by typical laboratory casework.  The benchtop vibration amplitudes at which […]...
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Use of vibration criteria in the selection of building systems for nanoscale research facilities

Stringent vibration requirements must be met for laboratories housing sensitive equipment for nanotechnology research.  This paper provides guidance to the designer in the selection of structural systems to limit vibrations to acceptable levels.  Comments are also made on site selection, building planning issues, and cost-effectiveness solutions.  The concepts proposed are illustrated with examples of the […]...
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Evolving criteria for research facilities: vibration

ABSTRACT The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the “BBN” criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared […]...
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Tool or Facility – What Should it Be? Reconciling Differences between Production Equipment Needs and Facility Support

It is not unusual for production equipment’s environmental requirements to be more stringent than the facility can economically provide, thus forming a “gap” between tool needs and facility capabilities, as shown in Fig. 1.  The gap can involve requirements for vibration, sound, EMI, cleanliness, or any of the many other environmental parameters.  This paper presents […]...
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Facility Vibration Issues for Nanotechnology Research

The paper presents an overview of the vibration requirements of nanotechnology facilities, drawn from both the semiconductor world and that of precision metrology. Structural approaches are discussed which are commonly used to meet some of the special vibration needs of these facilities. H. Amick, M. Gendreau, and C. G. Gordon, “Facility Vibration Issues for Nanotechnology […]...
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Meeting The Vibration Challenges Of Next-Generation Photolithography Tools

In the past, the vibration design process has been driven by the requirements for an acceptable ambient vibration environment for tools. However, the newest generation of photolithography tools, the "scanners" or "step-and-scan" systems, impose an additional requirement for the dynamic resistance properties of the tool's support points. This paper discusses the current scanner support criteria […]...
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Designing for Vibrations in the Laboratory

Many processes involved in advanced technology applications are highly sensitive to vibrations. Among these processes are precision metrology, high-energy physics, long-beam-path laser applications, biotechnology research, and the R&D and production of semiconductors. When designing facilities housing this equipment, considerable attention is spent on the mechanical and structural aspects. In most cases, vibration control measures add […]...
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Construction Vibrations and Their Impact on Vibration-Sensitive Facilities

Abstract An approach is presented for performing site-specific assessment of the impact of construction vibrations on vibration-sensitive facilities. This requires expansion of existing methodologies such that frequency content is included. A case study is included. Introduction Many processes involved in advanced technology applications are highly sensitive to vibrations. Among these processes are precision metrology, high-energy […]...
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Vibration Control Design of High Technology Facilities

High technology equipment such as that used for the production of advanced integrated circuits, for precision metrology, and for microbiological or optical research, requires environments with extremely limited vibrations. Ground motions, personnel activities, and the extensive support machinery typically present in high technology facilities may produce unacceptably severe vibrations, unless mitigation of these vibrations is […]...
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Generic Vibration Criteria for Vibration-Sensitive Equipment

The vibration criterion (VC) curves, commonly used in the design of facilities which house vibration-sensitive instruments and tools, were developed by the author and his colleagues, in the early 80's, published by SPIE in 1991 and by IEST in 1993. Each of the criterion curves A through E is associated with a "line width" or […]...
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On Generic Vibration Criteria for Advanced Technology Facilities: with a Tutorial on Vibration Data Representation

Abstract The design of vibration-sensitive advanced technology facilities generally involves considerable attention to structural and mechanical aspects. In most cases, the vibration control measures contribute significantly to a facility’s cost. The selection of a vibration criterion for use in design is an important step in the design process. Many process equipment manufacturers have provided tool-specific […]...
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Vibration Prediction and Control in Microelectronics Facilities

The importance of vibration in microelectronics production can be appreciated when one considers the extreme sensitivity of the "tools" and systems used in the chip fabrication process and the large amount of mechanical energy that is consumed in a modern cleanroom.  The great difference in the ratio of "power consumed" to "sensitivity" lies at the […]...
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NIST – Advanced Technology Laboratories: Metrology Laboratories & Vibration Control

The focus of this paper will be on laboratory design and issues related to vibration mitigation based upon the recent experience of Henningson, Durham & Richardson, Inc. (HDR) and its consultant, Acentech Incorporated, in designing new Advanced Technology Laboratories (ATLs) for the National Institute of Standards & Technology (NIST). Issues related to site selection, laboratory […]...
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A Review of Several Methods for Processing Vibration Data

For many areas of acoustics, standards organizations or regulatory bodies have mandated vibration or noise criteria and defined the appropriate processing methods. No such standards exist for vibration-sensitive facilities at this time except as defined by equipment manufacturers, facility owners, and/or vibration consultants. The existing criteria from these groups differ widely in form. This paper […]...
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The Design of Low-Vibration Buildings Two Case Histories

Two case histories are presented that illustrate two aspects of the design problems.  The first is entitled “The Role of Special Foundations in the Design of Low Vibration Buildings.”  The Second is entitled “The Role of Sprung Floors in the Design of Low Vibration Environments.” Colin G. Gordon, “The Design of Low-Vibration Buildings Two Case […]...
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The Design of Low-Vibration Buildings for Microelectronics and Other Occupancies

In this paper I present an overview of the factors and problems that must be considered in designing low-vibration buildings. Subjects covered include vibration criteria for different occupancies, sources of vibration and response predictions, and major design factors for vibration control. Colin G. Gordon, “The Design of Low-Vibration Buildings for Microelectronics and Other Occupancies,” First […]...
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Cost-Effective Design of Practically Vibration-Free High-Technology Facilities

Advanced electro-optical equipment, such as that used in the production of integrated circuits, requires clean environments with extremely limited vibrations.  Ground motions, personnel activities, and mechanical equipment tend to produce unacceptably severe vibrations in high-technology facilities, unless suitable precautions are taken. Ungar, E. E., and Gordon, C. G., “Cost-Effective Design of Practically Vibration-Free High-Technology Facilities,” […]...
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Vibration Criteria for Microelectronics Manufacturing Equipment

The trend toward integrated circuits consisting of smaller, more tightly packed, elements has led to the requirement for greater precision and stability in microelectronics manufacturing and inspection equipment.  There exists the need for a better quantitative understanding of the effects of environmental vibrations on this type of equipment, in order to enable microelectronics facility designers […]...
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Vibration Challenges in Microelectronics Manufacturing

The manufacture of smaller, more tightly packed, integrated circuits requires facilities designed to meet stringent vibration requirements.  Vibration control is complicated by the need for extensive process support equipment and some service personnel in the vicinity of the sensitive machines.  Facility criteria that have been developed on the basis of earlier facility experience have tended […]...
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