High technology equipment such as that used for the production of advanced integrated circuits, for precision metrology, and for microbiological or optical research, requires environments with extremely limited vibrations. Ground motions, personnel activities, and the extensive support machinery typically present in high technology facilities may produce unacceptably severe vibrations, unless mitigation of these vibrations is taken into account in the facility design. This article is intended to present pertinent facility design criteria and to summarize approaches to achieving the desired vibration environments.
E. Ungar, D. Sturz, and H. Amick, “Vibration Control Design of High-Technology Facilities,” Technical Addendum in Architectural Acoustics Design Guide, James Cowan, McGraw-Hill, 2000, pp. 215-229.d36f8bb95b8ba69714c5d271d13fe24f