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December 1, 1999

Environmental Noise Control for Semiconductor Manufacturing Facilities

This paper summarizes the authors' experience in modeling and controlling environmental noise from more than 30 semiconductor manufacturing plants ("wafer fabs") within the past six years. This type of facility typically has a large number of concentrated noise sources because of the unusually large amount of intake and circulation air required to maintain cleanroom conditions, the complex exhaust and pollution control equipment necessary to handle many specialty gases and chemical products, and high heating and cooling load requirements. Furthermore, these facilities are most often located in populated areas, making noise control important, as well as challenging. Modeling and noise control details for specific types of equipment (make-up air and exhaust fans, cooling towers, ventilated boiler and chiller rooms, piping, valves, etc.), as well as other considerations-such as site building layout with respect to sensitive residential areas-are discussed.

M. Gendreau and M. Wu, “Environmental Noise Control for Semiconductor Manufacturing Facilities,” Proceedings of Inter-Noise 99: The 1999 Congress and Exposition on Noise Control Engineering, Fort Lauderdale FL, USA (December 1999), pp. 1099-1104