In the past, the vibration design process has been driven by the requirements for an acceptable ambient vibration environment for tools. However, the newest generation of photolithography tools, the "scanners" or "step-and-scan" systems, impose an additional requirement for the dynamic resistance properties of the tool's support points. This paper discusses the current scanner support criteria in terms of receptance spectra, and compares them with receptance measurements carried out in several fabs. Design philosophies are discussed for both floor structures and tool support pedestals.
H. Amick and A. Bayat, "Meeting The Vibration Challenges Of Next-Generation Photolithography Tools," Sound & Vibration, Vol. 36, No. 3, pp. 22-24 (March 2002).0a7703b3c7f239cd6a805cbe149c65df