Ungar, E. E., and Gordon, C. G., “Cost-Effective Design of Practically Vibration-Free High-Technology Facilities,” Proceedings of Symposium sponsored by Environmental Engineering Division of American Society of Civil Engineers, pp. 121-130 (May 1985)bbdd8f55d608b1847c1a5a7f69808a1d
May 1, 1985
Cost-Effective Design of Practically Vibration-Free High-Technology Facilities
Advanced electro-optical equipment, such as that used in the production of integrated circuits, requires clean environments with extremely limited vibrations. Ground motions, personnel activities, and mechanical equipment tend to produce unacceptably severe vibrations in high-technology facilities, unless suitable precautions are taken.