The site vibration requirements for microelectronics facilities engaged in the production of integrated circuits are becoming increasingly more stringent as the line widths involved in the circuitry continue to decrease. More and more one encounters sites that are marginally acceptable or inadequate on which the ambient levels are too high. In this paper we shall briefly review some of the techniques that might be considered to reduce site ambient vibrations. Such techniques include the use of trenches, deep foundations, piles, and spring isolation. Some limited field data will be presented.
Colin G. Gordon and Hal Amick, “Groundborne Vibration – Thoughts on Control by Foundation Design and Other Techniques,” Proceedings of Inter-Noise 89, Newport Beach, California (December 1989)