Modern clean rooms of the sort used by the microelectronics industry in the fabrication of integrated circuits are typically quite noisy with levels lying in the range PNC 55 to 75. The noise can degrade the performance of production and test equipment. It also interferes with speech and telephone use and adds generally to the environmental discomfort suffered by personnel. In this paper we will discuss the causes of clean room noise and give examples of measured data. We will discuss criteria and the methods currently available to achieve these criteria in a modern clean room design.
Colin G. Gordon and Amir M. Yazdanniyaz, “Noise Prediction and Control in Microelectronics Clean Rooms,” Proceedings of Inter-Noise 89, Newport Beach, California (December 1989).
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