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Research tagged "microscope criteria"

On Generic Vibration Criteria for Advanced Technology Facilities: with a Tutorial on Vibration Data Representation

Abstract The design of vibration-sensitive advanced technology facilities generally involves considerable attention to structural and mechanical aspects. In most cases, the vibration control measures contribute significantly to a facility’s cost. The selection of a vibration criterion for use in design is an important step in the design process. Many process equipment manufacturers have provided tool-specific […]...
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