Expertise Facility Types

Research tagged "site vibration"

Evolving criteria for research facilities: vibration

ABSTRACT The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the “BBN” criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared […]...
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Protecting vibration environments with zoning and land-use ordinances

Historically, the primary purposes of municipal land use zoning ordinances are to protect and promote a desired quality of life and to ensure that incompatible land uses do not occur. Typical environmental quality considerations include water, air, solid waste, and noise. Seldom, if ever, are vibrations considered; when they are, it is often in the […]...
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Specifying and Interpreting a Site Vibration Evaluation

Many pieces of semiconductor production and test equipment are highly sensitive to vibration. Equipment manufacturers often provide environmental vibration limits and recommend, even require, a site vibration evaluation prior to installation of a system. Suppose a company is planning to install one of these systems. What does the manufacturer's vibration specification really mean? What should […]...
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