Fan-filter units are an increasingly popular alternative to packaged air handlers and fan-tower recirculation air systems. They are used in mini-environments and general cleanrooms, especially in retrofit cleanrooms with limited height. This paper presents noise and vibration data measured on 8 fan-filter units. It also presents measurement methods and performance criteria for fan-filter units.
Colin G. Gordon and Mei Q. Wu, "Noise and Vibration Characteristics of Cleanroom Fan-Filter Units," presented at IEST Meeting, Phoenix, AZ, 1998.71c5dcd4e90be9a6eed216118dc812dd