Vibration is a major source of contamination in any Fab facility and can have disastrous effects on plant output. When a Fabrication plant needs to be updated, the existing structure of the buildings may require extensive alteration to meet the new criteria of future operation. The sources of vibration both external and internal to the facility are examined in detail and appropriate solutions described.
Colin Gordon, “Vibration issues in Facility Refurbishing,” FabTech Edition 09, Fab Management section, 01 March 1999
be1a0cdc64b69f1224a569e1ad12f90d