William H. Semke, Lowell K. Siewert, Andrew R. Mikkelson, Eric A. Risius, Ning Tang, Roxann L. Engestad, Edward G. Lovell, Jun-Fei Zheng, Dao Giang, "Pellicle-Induced Distortions in Advanced Optical Reticles," Proceedings of SPIE 20th Annual BACUS Symposium on Photomask Technology, Vol. 4186, pp. 207-216, Monterey, CA, 2000.