Expertise Facility Types

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Our consultants regularly engage in research activities related to our normal client services. This archive includes the majority of the published technical papers, presentations, and other publications related to this research.

Case Study – Vibration Source Investigation in Large Semiconductor Fab Facility

    ABSTRACT Semiconductor fabrication facilities contain many vibration sensitive instruments which are often in close proximity to large vibration sources. A good structural system and proper vibration isolation of mechanical equipment is required to minimize the impact from sources such as pumps, fans, piping, and ducts within the building. This paper presents a case […]...
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