The trend toward integrated circuits consisting of smaller, more tightly packed, elements has led to the requirement for greater precision and stability in microelectronics manufacturing and inspection equipment. There exists the need for a better quantitative understanding of the effects of environmental vibrations on this type of equipment, in order to enable microelectronics facility designers to provide suitable environments without costly overdesign.
Gordon, C. G., and Ungar, E. E., “Vibration Criteria for Microelectronics Manufacturing Equipment,” Proceedings of Inter-Noise 83, pp. 487-490 (July 1983).
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