Advanced electro-optical equipment, such as that used in the production of integrated circuits, requires clean environments with extremely limited vibrations. Ground motions, personnel activities, and mechanical equipment tend to produce unacceptably severe vibrations in high-technology facilities, unless suitable precautions are taken.
Ungar, E. E., and Gordon, C. G., “Cost-Effective Design of Practically Vibration-Free High-Technology Facilities,” Proceedings of Symposium sponsored by Environmental Engineering Division of American Society of Civil Engineers, pp. 121-130 (May 1985)
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