Vibration control in vibration-sensitive advanced technology facilities generally involves design of a stiff floor for the vibration-sensitive area. The authors have found that the range of floor stiffness required for semiconductor facilities and laboratories falls on a continuum between "soft" and "stiff" floors. A significant variation in properties can be observed along this continuum. This paper will review the dynamic properties of floors, addressing the effects of column-slab interaction on their point stiffness and resonance frequency.
Amick, H., and A. Bayat, “Dynamics of Stiff Floors for Advanced Technology Facilities,” Proceedings of 12th ASCE Engineering Mechanics Conference, La Jolla, CA, American Society of Civil Engineers, pp. 318-321, (May, 1998).313ea37b937be0c81dc69e38d8e460f9