The importance of vibration in microelectronics production can be appreciated when one considers the extreme sensitivity of the "tools" and systems used in the chip fabrication process and the large amount of mechanical energy that is consumed in a modern cleanroom. The great difference in the ratio of "power consumed" to "sensitivity" lies at the heart of the vibration problem in cleanroom design. To provide a basis against which the vibration “quality" of process floors supporting these tools can be quantified, various criteria have been proposed. The most widely used criteria are the "generic" vibration criterion (VC) curves.
Colin G. Gordon, “Vibration Prediction and Control in Microelectronics Facilities,” Proceedings of Internoise 96, Liverpool, England (July, 1996).
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