Optical Metrology Tool Vibration Specification
Photon Dynamics
Equipment Design, High Tech Research and Manufacturing
Projects tagged "advanced technology facilities"
Extreme Ultraviolet Lithograph System Sensitivity Study
Sandia National Laboratory
Equipment Design
Crystal Grower Sensitivity Study
Confidential Client
Equipment Design
Prober Equipment Vibration Sensitivity
Tokyo Electron Ltd (TEL)
Equipment Design, High Tech Research and Manufacturing
Micro-Positioning Spinstand and Disk Device Manufacturing Equipment
Seagate Technology
Equipment Design
Mechanical and Process Equipment Noise and Vibration Control
Multiple Semiconductor Manufacturing Clients
Environmental Noise, Industrial
Nitrogen Plant Noise Control
Linde
Environmental Noise, Industrial
Research tagged "advanced technology facilities"
Case Study – Vibration Source Investigation in Large Semiconductor Fab Facility
ABSTRACT Semiconductor fabrication facilities contain many vibration sensitive instruments which are often in close proximity to large vibration sources. A good structural system and proper vibration isolation of mechanical equipment is required to minimize the impact from sources such as pumps, fans, piping, and ducts within the building. This paper presents a case […]...
Construction vibration monitoring for sensitive facilities
Building expansion and densely developed campuses often require construction adjacent to highly vibration sensitive facilities such as advanced technology manufacturing, laboratories, and hospitals. The vibration generated by the construction work poses a considerable risk to the sensitive processes in these facilities, which typically need to continue operations during construction. In these scenarios it is often […]...
Long-span truss structures for low-vibration environments
Historically, waffle slabs have been widely used in the process floor design in semiconductor production facilities. In a less stringent vibration environment, concrete joist slab with stiffeners could be a suitable design option. In both of the two approaches, the effectiveness of vibration control in floor structures would be substantially reduced when the column span […]...
Considerations regarding the appropriate timing for advanced technology facility vibration surveys
Vibration surveys are carried out for a variety of reasons over the lifetime of a facility for semiconductor fabrication (fab) or other advanced technology process.[1] Evaluations may take place as part of the site selection effort, during construction, or during the productive life of the facility. Generally, there should be a reason for a vibration […]...
Maturation’ of the Vibration Environment in Advanced Technology Facilities
Abstract Semiconductor production and other advanced technology facilities are often designed in two stages, delineated as “base build” and “hook up”. The first stage, at completion termed “as-built” by ISO, includes the design and construction of the shell structure and all architectural, mechanical, electrical, and process systems needed to operate the building. The second stage, […]...
Noise in Cleanrooms Served by Fan-Filter Units: Design Considerations
This paper is concerned with noise conditions in cleanrooms served by fan-filter units (FFUs), primarily of higher order clean class (ISO Class 1 through 5), although the concepts discussed also apply to rooms with higher particle counts (ISO Class 6 and higher). The need for frequent air changes to achieve the cleanliness goal is often […]...
Vibration Design of 300 mm Wafer Fabs
The semiconductor industry is experiencing the transition from 200mm to 300mm fabs. With a number of 300mm fabs now on-line, and many more in the construction and start-up stages, a discussion of 300mm fab design is pertinent. Vibration is an important concern in fab design and construction because many items of precision equipment (or “tools”) […]...
Building Design for Advanced Technology Instruments Sensitive to Acoustical Noise
This is from the first of the BAT Workshops, and presents an overview of acoustics and noise control in the research setting. M. Gendreau, “Building Design for Advanced Technology Instruments Sensitive to Acoustical Noise,” Invited Seminar, presented at Buildings for Advanced Technology Workshop, National Institute of Standards and Technology, Gaithersburg MD, USA, 14 January 2003...
Vibrations of Raised Access Floors
Raised access floors play a critical role in modern cleanroom design. They have unique mechanical properties that make them respond to dynamic loading in a manner quite different from conventional floors. For example, an unbraced floor is much more flexible horizontally than in the vertical direction. Horizontal vibration amplitudes with walker excitation may exceed 100 […]...
Meeting The Vibration Challenges Of Next-Generation Photolithography Tools
In the past, the vibration design process has been driven by the requirements for an acceptable ambient vibration environment for tools. However, the newest generation of photolithography tools, the "scanners" or "step-and-scan" systems, impose an additional requirement for the dynamic resistance properties of the tool's support points. This paper discusses the current scanner support criteria […]...
Construction Vibrations and Their Impact on Vibration-Sensitive Facilities
Abstract An approach is presented for performing site-specific assessment of the impact of construction vibrations on vibration-sensitive facilities. This requires expansion of existing methodologies such that frequency content is included. A case study is included. Introduction Many processes involved in advanced technology applications are highly sensitive to vibrations. Among these processes are precision metrology, high-energy […]...